Title :
Analysis Image of Multiplayer Thin Films
Author :
Li Jing ; Weng Guirong
Author_Institution :
Sch. of Mechanic & Electron. Eng., Soochow Univ., Suzhou, China
Abstract :
According to the microstructure´ characteristics of multi player thin film materials images under AFM, SEM and TEM, mathematical morphology and theories of non-local algorithm were used in image processing of multiplayer thin films, including noise reduction, enhancement, fusion and object segmentation. Through analysis of multiplayer thin films´ surface microstructure, thin films images were improved. Some suggestions are put forward to regulate technological parameters of multiplayer thin films. The experiment shows that this processing method is effective and feasible, and image quality can be improved greatly.
Keywords :
atomic force microscopy; image enhancement; image fusion; image segmentation; scanning electron microscopy; surface structure; thin films; transmission electron microscopy; atomic force microscopy; image enhancement; image fusion; image processing; image quality; mathematical morphology; multiplayer thin film materials images; noise reduction; object segmentation; scanning electron microscopy; surface microstructure; transmission electron microscopy; Algorithm design and analysis; Atomic force microscopy; Image analysis; Image processing; Microstructure; Noise reduction; Pixel; Scanning electron microscopy; Surface morphology; Transistors;
Conference_Titel :
Photonics and Optoelectronic (SOPO), 2010 Symposium on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-4963-7
Electronic_ISBN :
978-1-4244-4964-4
DOI :
10.1109/SOPO.2010.5504184
