Title :
Dynamic Optical Characterization of NEMS Resonators
Author :
Coudron, L. ; Casset, F. ; Durand, C. ; Renaux, P. ; Ollier, E. ; Bloch, D. ; Vairac, P.
Author_Institution :
STMicroelectron., Crolles
Abstract :
The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam and plate resonators obtained using the silicon-on-nothing (SoN) process. We obtained respectively 6.6 and 10.5 MHz resonant frequency for these devices, in correlation with ANSYS simulation predictions. Dynamic optical characterization seems to be a promising method to study nanoelectromechanical devices in the aim to enhance their performances.
Keywords :
CMOS integrated circuits; light interferometry; micromechanical resonators; nanoelectronics; signal detection; ANSYS simulation; CMOS process; MEMS; NEMS electromechanical resonators; beam resonators; dynamic optical characterization; frequency 10.5 MHz; frequency 6.6 MHz; heterodyne interferometric measurements; nanoelectromechanical devices; output signal detection; plate resonators; silicon-on-nothing process; CMOS process; Frequency; Micromechanical devices; Nanoelectromechanical systems; Optical interferometry; Optical mixing; Optical resonators; Performance evaluation; Signal detection; Standards development;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2008. SiRF 2008. IEEE Topical Meeting on
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4244-1855-8
Electronic_ISBN :
978-1-4244-1856-5
DOI :
10.1109/SMIC.2008.33
