• DocumentCode
    2939844
  • Title

    A Novel Hybrid Micromirror for Large Apertures Laser Application

  • Author

    Li, Jie ; Chen, Xiqu

  • Author_Institution
    Dept. of Electr. & Inf. Eng., Wuhan Polytech. Univ., Wuhan, China
  • fYear
    2010
  • fDate
    19-21 June 2010
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications . Each mirror is composed of bottom electrode, support part and mirror plate, in which a T type beam structure is used to support the mirror plate. It can provide mirror with the vertical movement and the rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 um, while the rotation angle around X and Y axis are ±±2.3o and ±1.45° respectively.
  • Keywords
    laser beam applications; laser mirrors; micromachining; micromirrors; bottom electrode; hybrid micromirror; large apertures; laser applications; micromachined segmented mirror array; time varying aberrations; Adaptive optics; Apertures; Electrodes; Laser applications; Micromechanical devices; Micromirrors; Mirrors; Optical arrays; Phased arrays; Pistons;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics and Optoelectronic (SOPO), 2010 Symposium on
  • Conference_Location
    Chengdu
  • Print_ISBN
    978-1-4244-4963-7
  • Electronic_ISBN
    978-1-4244-4964-4
  • Type

    conf

  • DOI
    10.1109/SOPO.2010.5504334
  • Filename
    5504334
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2939844