Automated statistical process matching across the virtual fab

Author

Nirgude, Girish ; Nassar, Diaa

Author_Institution

Intel Corp., Hillsboro

fYear

2007

fDate

15-17 Oct. 2007

Firstpage

1

Lastpage

4

Abstract

Statistical process matching plays a central role in detecting and minimizing special and common cause variations in semiconductor manufacturing. Performing automated statistical matching across many fabs, thousands of tools and millions of data points at acceptable performance and scalability requires a complex automation infrastructure. In this paper, we cover the main features of Intel´s fab automation infrastructure that facilitates a multitude of offline statistical analyses.

Keywords

notch filters; operational amplifiers; power factor correction; power harmonic filters; transient response; voltage control; Intel fab automation infrastructure; automated statistical matching; automated statistical process matching; complex automation infrastructure; semiconductor manufacturing; statistical analyses; virtual fab; Data analysis; Data mining; Databases; Decision making; Engines; Logic; Manufacturing automation; Manufacturing processes; Process control; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on

Conference_Location

Santa Clara, CA

ISSN

1523-553X

Print_ISBN

978-1-4244-1142-9

Electronic_ISBN

1523-553X

Type

conf

DOI

10.1109/ISSM.2007.4446838

Filename

4446838