DocumentCode
2944883
Title
Optimization of semiconductor manufacturing equipment seals for enhanced performance
Author
Foggiato, John ; Thrash, Aaron ; Freerks, Fred ; Al-Saleem, Furat
Author_Institution
Green Tweed & Co., Santa Clara
fYear
2007
fDate
15-17 Oct. 2007
Firstpage
1
Lastpage
4
Abstract
A review of materials and optimization of seal designs is given with emphasis on the requirements for semiconductor manufacturing equipment. Various attributes are delineated as they pertain to aggressive temperature and chemical environments.
Keywords
electronics industry; seals (stoppers); semiconductor device manufacture; seal design optimization; seal materials; semiconductor manufacturing equipment seals; Chemical vapor deposition; Cleaning; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma temperature; Sealing materials; Seals; Semiconductor device manufacture; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
978-1-4244-1142-9
Electronic_ISBN
1523-553X
Type
conf
DOI
10.1109/ISSM.2007.4446847
Filename
4446847
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