Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing

This paper reports a new 2-degree of freedom (DoF) microelectromechanical systems (MEMS) nanopositioner with actuation and sensing elements on the same chip. Novel features of this MEMS device include its 2-DoF (x-y axis) motion capability, the achievement of bi-directional movement (positive and negative displacement) along each axis thanks to the use of Z-shaped electrothermal actuators, and the measurement of x-y displacements by integrated electrothermal sensors positioned underneath the moving stage. The experimental characterization shows that displacements in excess of -5μm/+5μm and a response time of less than 300ms are achievable.