DocumentCode
2945441
Title
Gold recovery - high efficient, cost effective and reliable
Author
Jantschak, Andreas ; Daniels, Marc
Author_Institution
NXP Semicond., Hamburg
fYear
2007
fDate
15-17 Oct. 2007
Firstpage
1
Lastpage
4
Abstract
In the semiconductor industry gold is used in different applications. Regarding the high costs of the gold and the amounts applied in the metalization processes it is worth to recover a maximum of that precious metal. The introduction of the new recovery concept described in this abstract meant a breakthrough in gold recycling for NXP Semiconductors Hamburg. The results of this project demonstrate that it is possible to establish this kind of recovery process in the semiconductor industry.
Keywords
gold; metallisation; recycling; semiconductor device manufacture; Au; NXP Semiconductors Hamburg; gold recovery process; gold recycling; metalization processes; semiconductor industry; Aluminum; Chemicals; Cleaning; Costs; Electronics industry; Etching; Gold; Semiconductor device reliability; Solids; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
978-1-4244-1142-9
Electronic_ISBN
1523-553X
Type
conf
DOI
10.1109/ISSM.2007.4446879
Filename
4446879
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