Current induced magnetization switching in 30nm ÿ? scale CPP-GMR spin valves fabricated using EB assisted CVD hard masks

The authors have developed EB assisted chemical-vapor-deposition (CVD) hard mask method. We have reported that by using this method, CPP-GMR spin valves with the minimum pillar size of 34nm could be achieved and a reasonable MR properties were obtained. In this study, CIMS observation was demonstrated in CPP-GMR spin valves with nominal size of 30-80 nm fabricated using EB assisted CVD hard masks. Then we considered size effect on the CIMS phenomena.