Microlens-integrated vertical-cavity surface-emitting lasers for large-tolerant fiber optic coupling

Author

Song, Young Min ; Chang, Ki Soo ; Lee, Yong Tak

Author_Institution

Gwangju Inst. of Sci. & Technol., Gwangju

fYear

2007

fDate

6-8 Dec. 2007

Firstpage

1

Lastpage

4

Abstract

We have fabricated microlens-integrated vertical-cavity surface-emitting lasers (VCSELs) by selective oxidation of composition-graded digital alloy AlGaAs. Microlens-integrated VCSELs with self-aligned structure was fabricated using standard VCSEL processing without additional process steps, due to the simultaneous formation of a microlens and oxide aperture. The output beam from the oxide-buried and oxide-removed AlGaAs microlens-integrated VCSELs has a beam radius of 3.7 mum and 3.5 mum at a distance of about 25 mum and 15 mum, respectively, from the surface of the VCSEL. From the calculation of VCSEL-to-SM fiber coupling efficiency, the oxide-buried lensed-VCSELs exhibited 1-dB axial alignment tolerance range of about 40 mum.

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; integrated optoelectronics; laser cavity resonators; microlenses; optical fibre couplers; surface emitting lasers; AlGaAs; VCSEL; alignment tolerance; beam radius; composition-graded digital alloy; fiber coupling efficiency; microlens-integrated vertical-cavity surface-emitting lasers; oxide aperture; selective oxidation; self-aligned structure; Digital alloys; Fiber lasers; Laser beams; Lenses; Microoptics; Optical coupling; Optical fibers; Oxidation; Surface emitting lasers; Vertical cavity surface emitting lasers; VCSEL; coupling efficiency; digital alloy; microlens; selective oxidation;

fLanguage

English

Publisher

ieee

Conference_Titel

ICTON Mediterranean Winter Conference, 2007. ICTON-MW 2007

Conference_Location

Sousse

Print_ISBN

978-1-4244-1639-4

Electronic_ISBN

978-1-4244-1639-4

Type

conf

DOI

10.1109/ICTONMW.2007.4446980

Filename

4446980