Title :
A quantum cascade laser using a native-oxide-defined current aperture and optical waveguide
Author :
Farmer, C.D. ; Keightley, P.T. ; Ironside, C.N. ; Stanley, C.R. ; Wilson, L.R. ; Cockburn, J.W.
Author_Institution :
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
Abstract :
Summary form only. The long wavelength of quantum cascade (QC) lasers mediates against good confinement of the optical mode to the waveguide core and so a thick, ´plasma-enhanced´ waveguide is normally used. We report a fabrication technique which provides electrical and optical confinement by conversion (rather than removal) of the Al/sub 0.48/In/sub 0.52/As upper cladding to a native oxide. In this technique, planar (vertical) selective thermal wet oxidation (PSWOX), the oxidation reaction begins at the AlInAs surface and proceeds downwards through the semiconductor using H/sub 2/O to convert the AlInAs into an oxide mainly composed of amorphous matrix (AlO/sub x/, As), with crystallised In/sub 2/O/sub 3/.
Keywords :
optical fabrication; oxidation; quantum well lasers; semiconductor technology; Al/sub 0.48/In/sub 0.52/As; Al/sub 0.48/In/sub 0.52/As upper cladding; AlInAs surface; In/sub 2/O/sub 3/; In/sub 2/O/sub 3//sup 2/; amorphous matrix; fabrication technique; native oxide; native-oxide-defined current aperture; optical confinement; optical waveguide; planar vertical selective thermal wet oxidation; plasma-enhanced waveguide; quantum cascade laser; waveguide core; Amorphous materials; Laser modes; Optical device fabrication; Optical surface waves; Optical waveguides; Oxidation; Plasma confinement; Plasma waves; Quantum cascade lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.909821