Piezoelectric sensor array for passive fish-like underwater sensing

The paper reports the fabrication, characterization, and experimental results of a piezoelectric MEMS pressure sensor array for underwater sensing applications. An array of five PZT sensors is developed that can perform passive fish-like underwater sensing. The array is capable of locating underwater objects by transducing the pressure variations generated by moving objects. Individual sensors have a low foot-print of 1.8 × 1.8 mm and do not consume any power for their operation. The array´s ability in locating a vibrating sphere stimulus underwater, is explained through proof-of-concept experiments.