DocumentCode
2948609
Title
High-Q RF MEMS capacitor with digital/analog tuning capabilities
Author
Grichener, Alex ; Lakshminarayanan, Balaji ; Rebeiz, Gabriel M.
Author_Institution
Electrical and Computer Engineering Department, University of California, San Diego 92122, USA
fYear
2008
fDate
15-20 June 2008
Firstpage
1283
Lastpage
1286
Abstract
This paper presents an RF MEMS switchedcapacitor suitable for tunable filters and reconfigurable matching networks. The switched-capacitor contains design features that result in a tunable capacitance ratio of 5–7, a high-Q (≫ 100) at C to X-band frequencies, and excellent reliability performance. The switched-capacitor has been temperature cycled to 120° C with only a 3–4 V change in the pull-down voltage. The design also features a digital switched-capacitor mode and an analog tuning mode, making it ideal for precision tuning.
Keywords
Capacitance; Capacitors; Dielectrics; Electrodes; Filters; Radio frequency; Radiofrequency microelectromechanical systems; Structural beams; Switches; Voltage; RF MEMS; reconfigurable network; reliability; tunable capacitors; tunable filters;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2008 IEEE MTT-S International
Conference_Location
Atlanta, GA, USA
ISSN
0149-645X
Print_ISBN
978-1-4244-1780-3
Electronic_ISBN
0149-645X
Type
conf
DOI
10.1109/MWSYM.2008.4633294
Filename
4633294
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