Title :
Monte-Carlo analysis of measurement uncertainties for on-wafer thru-reflect-line calibrations
Author :
Leinhos, J. ; Arz, U.
Author_Institution :
Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig Germany
Abstract :
Although on-wafer high-frequency measurements are nowadays commonly used, uncertainties for scattering - parameter measurements in planar transmission lines are still not yet established - a problem which has been long solved in coaxial lines and waveguides. We describe a GUM-compliant approach that is capable of providing a traceability path for on-wafer measurements up to 50 GHz using the TRL calibration algorithm.
Keywords :
Monte Carlo methods; coaxial cables; transmission line theory; GUM-compliant approach; Monte-Carlo analysis; coaxial lines; frequency 50 GHz; measurement uncertainties; on-wafer high-frequency measurements; on-wafer thru-reflect-line calibrations; planar transmission lines; traceability path; Calibration; Coaxial components; Conductivity; Dielectric materials; Dielectric measurements; Dielectric substrates; Frequency; Measurement standards; Measurement uncertainty; Transmission line measurements;
Conference_Titel :
Microwave Symposium Digest, 2008 IEEE MTT-S International
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1780-3
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2008.4633323
