Title :
Detailed simulation for semiconductor manufacturing
Author :
Atherton, Robert W. ; Atherton, Linda F. ; Pool, Mark A.
Author_Institution :
In-Motion Technol., Mountain View, CA, USA
Abstract :
A factory model, ACHILLES, has been developed for detailed simulation of semiconductor manufacturing. Data for the model may be automatically collected from existing computer aided manufacturing systems. Use of a model in factory control places stringent requirements on its accuracy and speed. ACHILLES is used to develop accurate factory-specific models which have the necessary rapid execution time on personal computers. Another model called Thor performs detailed simulations of integrated processing tools. These very complex machines may incorporate several process steps into a single tool. They are currently being introduced into the semiconductor industry. There are many design and performance issues associated with production integrated processing equipment (PIPE) that can only be answered by detailed simulation. Progress made in factory modeling is discussed
Keywords :
digital simulation; electronic engineering computing; integrated circuit manufacture; manufacturing computer control; microcomputer applications; ACHILLES; Thor; accuracy; computer aided manufacturing systems; design issues; detailed simulation; factory control; factory model; integrated processing tools; performance issues; personal computers; production integrated processing equipment; rapid execution time; semiconductor manufacturing; speed; Automatic control; CADCAM; Computational modeling; Computer aided manufacturing; Electronics industry; Performance analysis; Production facilities; Semiconductor device manufacture; Semiconductor device modeling; Virtual manufacturing;
Conference_Titel :
Simulation Conference, 1990. Proceedings., Winter
Conference_Location :
New Orleans, LA
Print_ISBN :
0-911801-72-3
DOI :
10.1109/WSC.1990.129594
