Non-linearity compensation algorithm for the output signal of non-drive structural silicon micromachined gyroscope

Based on the analysis of compensation theory for non-drive structural silicon micromachined gyroscope, the programming and the debugging of software and the contrast of actual gyroscope output signal and compensated output signal, the feasibility of this non-linearity compensation algorithm is proven. Compensation errors based on this algorithm are proven to be tiny and the accuracy is proven to be very high by the testing and computational data. This algorithm is confirmed to eliminate the gyroscope signal error which is caused by the carrier rotation. Finally, the peak values of the gyroscopic output signal only to represent the linear relation with the yaw and pitch velocity so much so that the stability is enhanced. Thus the silicon micromachined gyroscopic signal processing system is consummated to make gyroscope utilizable.