A finite-capacity beam-search-algorithm for production scheduling in semiconductor manufacturing

Author

Habenicht, Ilka ; Monch, Lars

Author_Institution

Inst. of Inf. Syst., Tech. Univ. of Ilmenau, Germany

Volume

2

fYear

2002

fDate

8-11 Dec. 2002

Firstpage

1406

Abstract

In this paper we describe a finite-capacity algorithm that can be used for production scheduling in a semiconductor wafer fabrication facility (wafer fab). The algorithm is a beam-search-type algorithm. We describe the basic features of the algorithm. The implementation of the algorithm is based on the ILOG-Solver libraries. We describe the simulation environment, which is used to evaluate the performance of the proposed algorithm. We show some results from computational experiments with the algorithm and the simulation test-bed described.

Keywords

digital simulation; electronic engineering computing; production control; production engineering computing; semiconductor device manufacture; ILOG-Solver libraries; computational experiments; finite-capacity beam-search-algorithm; production scheduling; semiconductor manufacturing; semiconductor wafer fabrication facility; simulation environment; Circuit simulation; Circuit testing; Computational modeling; Fabrication; Information systems; Job shop scheduling; Libraries; Production systems; Scheduling algorithm; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Simulation Conference, 2002. Proceedings of the Winter

Print_ISBN

0-7803-7614-5

Type

conf

DOI

10.1109/WSC.2002.1166411

Filename

1166411