• DocumentCode
    296377
  • Title

    Deep level observation in InP by temperature dependence of the van der Pauw´s symmetry factor

  • Author

    Somogyi, K.

  • Author_Institution
    Res. Inst. for Tech. Phys., Hungarian Acad. of Sci., Budapest, Hungary
  • fYear
    1996
  • fDate
    21-25 Apr 1996
  • Firstpage
    710
  • Abstract
    Summary form only given. One of the most convenient methods of the basic characterisation of semiconductors is Hall effect measurement by van der Pauw´s geometry. As a “by-product” the symmetry factor and a function of the symmetry factor is calculated. In this work we wish to demonstrate that this factor can indicate quite important properties of the sample. Though these properties are connected with inhomogeneities, deep levels can be observed by the temperature dependence of the symmetry factor. Both bulk InP and InP layers on semi-insulating substrates have been studied
  • Keywords
    Hall effect; III-V semiconductors; deep levels; indium compounds; symmetry; Hall effect; InP; deep levels; inhomogeneities; semiconductor; symmetry factor; temperature dependence; van der Pauw measurement; Density estimation robust algorithm; Geometry; Hall effect; Indium phosphide; Physics; Semiconductor process modeling; Substrates; Temperature dependence; Temperature distribution; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
  • Conference_Location
    Schwabisch-Gmund
  • Print_ISBN
    0-7803-3283-0
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1996.492393
  • Filename
    492393