Title :
Technology and Design Cooperation: High-K MIM Capacitors for Microprocessor, IO, and Clocking
Author :
Sánchez, Héctor ; Mandhana, Om P. ; Johnstone, Bill ; Roberts, Doug ; Siegel, Joshua ; Melnick, Brad ; Celik, Muhsin ; Baker, Mike ; Hayden, Jim ; Min, Byoung ; Edgerton, John ; White, Bruce
Author_Institution :
Freescale Semicond. Inc., Austin
Abstract :
In this work a high-K MIM capacitor module has been described that has been shown to improve the frequency of microprocessors, stabilize the power supply noise of IOs and positively affect the resulting data eyes for high speed IO. Furthermore, improvements in high speed clocking are also achieved.
Keywords :
MIM devices; circuit noise; microprocessor chips; thin film capacitors; high speed IO circuits performance; high speed interface; high-K MIM capacitor design; microprocessor; power supply noise stabilization; Capacitance; Clocks; High K dielectric materials; High-K gate dielectrics; MIM capacitors; Microprocessors; Packaging; Power supplies; Semiconductor device noise; Voltage;
Conference_Titel :
International Interconnect Technology Conference, IEEE 2007
Conference_Location :
Burlingame, CA
Print_ISBN :
1-4244-1069-X
Electronic_ISBN :
1-4244-1070-3
DOI :
10.1109/IITC.2007.382356
