Title :
Carbon Nanotube Based Dielectric for Enhanced RF MEMS Reliability
Author :
Bordas, Chloe ; Grenier, Katia ; Dubuc, David ; Flahaut, Emmanuel ; Pacchini, Sebastien ; Paillard, Mathieu ; Cazaux, Jean-Louis
Author_Institution :
LAAS-CNRS, Toulouse
Abstract :
This paper presents the fabrication and experimental results of capacitive MEM switches with a carbon nanotubes (CNT) based dielectric for the first time to our knowledge. Double wall nanotubes (DWNT) have been incorporated in the switch silicon nitride dielectric to modify its properties regarding the charging effect. The impact of the CNT density on the MEMS reliability has been demonstrated: a switch lifetime enhancement greater than two orders of magnitude has been achieved.
Keywords :
carbon nanotubes; dielectric devices; microswitches; monolithic integrated circuits; RF MEMS reliability; capacitive MEM switches; carbon nanotubes dielectrics; double wall nanotubes; switch silicon nitride dielectrics; Carbon nanotubes; Dielectric substrates; Fabrication; Micromechanical devices; Power system reliability; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches; Voltage; Carbon nanotube; RF MEMS; dielectric charging; reliability; switches;
Conference_Titel :
Microwave Symposium, 2007. IEEE/MTT-S International
Conference_Location :
Honolulu, HI
Print_ISBN :
1-4244-0688-9
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2007.380449
