Improvement in power durability of SAW filters

Author

Nishihara, T. ; Uchishiba, H. ; Matsuda, T. ; Ikata, O. ; Satoh, Y.

Author_Institution

Fujitsu Labs. Ltd., Akashi, Japan

Volume

1

fYear

1995

fDate

7-10 Nov 1995

Firstpage

383

Abstract

This paper describes the improvement in power durability of SAW filters in terms of filter designs and electrode materials. In this study, we used the previously reported ladder-type filter composed of one-port SAW resonators. For filter design, short aperture length and reduction of resonant resistance improved power durability. We clarified the frequency dependence of chip temperature and lifetime in a ladder-type filter. For electrode materials, Cu sandwiched film has high power durability. This is caused by stone-wall-like structure and alloy formation in intermediate layers. The optimum Cu quantity for multi-layered film was significant for high power durability

Keywords

ladder filters; surface acoustic wave resonator filters; Cu; Cu sandwiched film; SAW filter; alloy formation; aperture length; chip temperature; design; electrode material; frequency dependence; ladder-type filter; lifetime; multilayered film; one-port SAW resonator; power durability; resonant resistance; stone-wall-like structure; Apertures; Electrodes; Fingers; Frequency; Magnetic separation; Piezoelectric films; Resonator filters; SAW filters; Surface acoustic waves; Temperature dependence;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE

Conference_Location

Seattle, WA

ISSN

1051-0117

Print_ISBN

0-7803-2940-6

Type

conf

DOI

10.1109/ULTSYM.1995.495603

Filename

495603