Title :
RF CMOS-MEMS cantilever resonator
Author :
Zainuddin, A. Anwar ; Karim, Jihane ; Nordin, A.N. ; Mohanraj, S.P. ; Taufik, M. Syamsi M. ; Khan, Sharifullah
Author_Institution :
ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
Abstract :
This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000.
Keywords :
CMOS integrated circuits; Q-factor; cantilevers; micromechanical resonators; radiofrequency integrated circuits; Q-factor; RF CMOS-MEMS resonator; RF transceiver filter; RF transceiver oscillator; cantilever beam; cantilever resonator; frequency 10.2 MHz; voltage 1.5 V; Aluminum; Electrodes; Micromechanical devices; Oscillators; Radio frequency; Resonant frequency; Structural beams; RF-MEMS; beam´s displacement; gain; oscillators; resonators;
Conference_Titel :
Smart Instrumentation, Measurement and Applications (ICSIMA), 2013 IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4799-0842-4
DOI :
10.1109/ICSIMA.2013.6717939
