Dynamic characteristics of aerostatic bearings in nano-precision stage

In this paper, the dynamical performance of nano-precision stage with an annular aerostatic bearing and vacuum preload has been investigated. A method of calculating the load capacity, stiffness and damping of aerostatic bearings is proposed. Then, it is discussed that how different design and working conditions of aerostatic bearings affects the dynamical performance of nano-precision stage. It is concluded that orifice diameter, air-gap clearance and supply pressure influence the dynamical performance of precision stage great. The natural frequencies of aerostatic bearings can avoid structure resonance and the working frequency of stage by designing bearing dimension and working conditions.