Title :
1KW X-PINCH SOFT X-RAY SOURCE POWERED BY A 500 KA, 100 NS, 40 PPS PULSER
Author :
Glidden, S.C. ; Richter, M. ; Hammer, D.A. ; Kalantar, D.H.
Keywords :
Costs; Microelectronics; Plasma materials processing; Plasma x-ray sources; Pulse measurements; Resists; Synchrotrons; Throughput; Wires; X-ray lithography;
Conference_Titel :
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
0-7803-1415-8
DOI :
10.1109/PPC.1993.513374
