Title :
The signal interrogation technology of MEMS optical fiber pressure sensor
Author :
Wang Cong-fei ; Wang Guang-long ; Chen Jian-hui ; Yi, Dun
Author_Institution :
Coll. of Mech. Eng., Inst. of Nanotechnol. & Microsyst., Shijiazhuang, China
Abstract :
This paper describes the Microelectromechanical Systems (MEMS) optical fiber pressure sensor signal interrogation systems. The white-light interferometry system, component test system (CTS) and self-calibrated interferometric intensity based (SCIIB) system are introduced. The signal of the optical fiber pressure sensor processing schemes is presented. With the system the cavity of the MEMS optical fiber pressure sensor is measured with high resolution by fringe analysis. The dynamic range of the measurement is large, which is from several microns to millimeters.
Keywords :
fibre optic sensors; light interferometry; microsensors; optical testing; pressure measurement; pressure sensors; MEMS optical fiber pressure sensor; component test system; fringe analysis; microelectromechanical system; self-calibrated interferometric intensity based system; signal interrogation technology; white-light interferometry system; Automatic testing; Microelectromechanical systems; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical interferometry; Sensor phenomena and characterization; Sensor systems; Signal processing; System testing;
Conference_Titel :
Information and Automation, 2009. ICIA '09. International Conference on
Conference_Location :
Zhuhai, Macau
Print_ISBN :
978-1-4244-3607-1
Electronic_ISBN :
978-1-4244-3608-8
DOI :
10.1109/ICINFA.2009.5205114
