Title :
Multilayer Fabry-Perot microbolometers for infrared detection
Author :
Han, Sang-Wook ; Park, Yoon Sok ; Neikirk, Dean P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Texas Univ., Austin, TX, USA
Abstract :
Conventional Fabry-Perot microbolometers have limited design parameters that can be used to tailor spectral response. To provide more design variables we consider two stacked bolometer layers, and use a genetic algorithm (GA) to find designs with specific spectral features. Objectives include broad band absorption over 3 to 13 microns and a two band design, with one layer absorbing 3-5 microns, while the other layer absorbs in the 7 to 14 micron band.
Keywords :
bolometers; genetic algorithms; infrared detectors; 3 to 13 microns; 3 to 5 microns; 7 to 14 microns; broad band absorption; genetic algorithms; infrared detection; multilayer Fabry-Perot microbolometers; spectral response; stacked bolometer layers; Algorithm design and analysis; Bolometers; Dielectrics; Electromagnetic wave absorption; Fabry-Perot; Infrared detectors; Interference; Microelectronics; Mirrors; Nonhomogeneous media;
Conference_Titel :
Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2005. IRMMW-THz 2005. The Joint 30th International Conference on
Print_ISBN :
0-7803-9348-1
DOI :
10.1109/ICIMW.2005.1572707
