• DocumentCode
    29742
  • Title

    Semiconductor Materials Optimization for a TFET Device With Central Nothing Region on Insulator

  • Author

    Ravariu, C.

  • Author_Institution
    Microelectron. Dept., Politeh. Univ. of Bucharest, Bucharest, Romania
  • Volume
    26
  • Issue
    3
  • fYear
    2013
  • fDate
    Aug. 2013
  • Firstpage
    406
  • Lastpage
    413
  • Abstract
    This paper presents the work regimes of an atypical SOI device. The proposed device belongs to the Tunneling FET class, but the main body is a vacuum cavity. Each layer has a maximum of 10 nm. Firstly, the paper studies the static characteristics of the proposed device by simulations for different semiconductor materials: Si, SiC and Ge, with different doping concentrations, in different bias conditions. Secondly, some key parameters are defined in order to establish the boundary of the different work regimes. The normal work regime is conditioned by the useful tunneling occurrence, maximum transconductance, and current capability, far away from the insulator breakdown that means a non-useful back-gate leakage current. The simulations reveal optimum Semiconductor-Vacuum-Semiconductor structures On Insulator for heavy doped films, thin oxides, and larger band gap materials. An optimum balance is offered by the SiC device with 10 nm thickness on 10 nm insulator with a cavity width of 2 nm.
  • Keywords
    elemental semiconductors; field effect transistors; germanium; optimisation; silicon; silicon compounds; silicon-on-insulator; tunnelling; TFET device; atypical SOI device; central nothing region on insulator; semiconductor materials optimization; static characteristics; tunneling FET class; Electric potential; Insulators; Logic gates; Silicon; Silicon carbide; Tunneling; Semiconductor materials; thin film transistors; tunnel transistors; vacuum microelectronics;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2013.2258411
  • Filename
    6506109