DocumentCode
29742
Title
Semiconductor Materials Optimization for a TFET Device With Central Nothing Region on Insulator
Author
Ravariu, C.
Author_Institution
Microelectron. Dept., Politeh. Univ. of Bucharest, Bucharest, Romania
Volume
26
Issue
3
fYear
2013
fDate
Aug. 2013
Firstpage
406
Lastpage
413
Abstract
This paper presents the work regimes of an atypical SOI device. The proposed device belongs to the Tunneling FET class, but the main body is a vacuum cavity. Each layer has a maximum of 10 nm. Firstly, the paper studies the static characteristics of the proposed device by simulations for different semiconductor materials: Si, SiC and Ge, with different doping concentrations, in different bias conditions. Secondly, some key parameters are defined in order to establish the boundary of the different work regimes. The normal work regime is conditioned by the useful tunneling occurrence, maximum transconductance, and current capability, far away from the insulator breakdown that means a non-useful back-gate leakage current. The simulations reveal optimum Semiconductor-Vacuum-Semiconductor structures On Insulator for heavy doped films, thin oxides, and larger band gap materials. An optimum balance is offered by the SiC device with 10 nm thickness on 10 nm insulator with a cavity width of 2 nm.
Keywords
elemental semiconductors; field effect transistors; germanium; optimisation; silicon; silicon compounds; silicon-on-insulator; tunnelling; TFET device; atypical SOI device; central nothing region on insulator; semiconductor materials optimization; static characteristics; tunneling FET class; Electric potential; Insulators; Logic gates; Silicon; Silicon carbide; Tunneling; Semiconductor materials; thin film transistors; tunnel transistors; vacuum microelectronics;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2258411
Filename
6506109
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