Title :
A high performance vibration sensor with extended floating gate
Author :
Peng, F. Benxian ; Yu, Ting ; Yu, Fengqi ; Feng, Yuchun
Author_Institution :
Dept. of Integrated Electron., Chinese Acad. of Sci., Shenzhen, China
Abstract :
A novel CMOS vibration sensor with extended floating gate is developed with simple circuitry to realize high sensitivity, linearity, and manufacturability. A method to enhance linearity by varying capacitance coupling coefficient relative to total capacitance is proposed. The sensor can maintain linearity in a large displacement range and its measurement range also greatly increases (up to plusmn33g). The sensor can achieve a resolution of 0.05g, obtained by ANSYS and HSPICE simulations. HSPICE models for time varying capacitance and floating gate are also proposed. The sensor has ultra low power consumption of only 824.3 muW and may be able to operate with a single coin cell battery.
Keywords :
CMOS digital integrated circuits; SPICE; capacitive sensors; finite element analysis; low-power electronics; microsensors; vibration measurement; ANSYS; CMOS vibration sensor; CMOS-MEMS system; HSPICE model; capacitance coupling coefficient; extended floating gate; high performance vibration sensor; single coin cell battery; time varying capacitance; ultra low power consumption; Capacitance; Capacitive sensors; Capacitors; Circuits; Dry etching; Foundries; Linearity; Vibrations; Wet etching; Wireless sensor networks; Extended gate; Linearity; Vibration sensor;
Conference_Titel :
Information and Automation, 2009. ICIA '09. International Conference on
Conference_Location :
Zhuhai, Macau
Print_ISBN :
978-1-4244-3607-1
Electronic_ISBN :
978-1-4244-3608-8
DOI :
10.1109/ICINFA.2009.5205174
