Resonance Technique for Accurate On-Wafer Characterization of Ferroelectric Varactors

A resonance technique for on-wafer characterization of ferroelectric varactors at microwave frequencies is proposed and experimentally verified. The approach is targeted on accurate assessment of the varactors losses if traditional approaches using planar transmission lines can not be used. A number of varactors based on 0.55 um thick BSTO film are measured using the proposed approach and results are compared to those obtained with the broadband reflection type measurement. It is demonstrated that the resonance technique is more accurate and reliable.