Title :
Modified hard anodization procedure to fabricate hybrid nanoporous alumina
Author :
Santos, A. ; Vojkuvka, L. ; Pallarés, J. ; Ferré-Borrull, J. ; Marsal, L.F.
Author_Institution :
Dept. d´´Eng. Electron., Univ. Rovira i Virgili, Tarragona
Abstract :
In this work we present an innovative approach to fabricate new structures based on nanoporous alumina. The fabrication process is carried out following a modified two-step hard anodization process in a 0.3 M oxalic acid solution at 120 V and 0degC. The nanoporous anodic alumina membranes present a hybrid pore structure which consist of pores with short diameters inner pores with longer diameters. This new nanostructure could be used to develop new chemical or biological sensors or to fabricate optoelectronic and storage devices.
Keywords :
alumina; membranes; nanoporous materials; Al2O3; hybrid pore structure; modified hard anodization; nanoporous anodic alumina membranes; oxalic acid solution; temperature 0 degC; two-step hard anodization process; voltage 120 V; Aluminum; Biomembranes; Biosensors; Chemical and biological sensors; Fabrication; Grain size; Nanobioscience; Nanoporous materials; Rough surfaces; Voltage;
Conference_Titel :
Electron Devices, 2009. CDE 2009. Spanish Conference on
Conference_Location :
Santiago de Compostela
Print_ISBN :
978-1-4244-2838-0
Electronic_ISBN :
978-1-4244-2839-7
DOI :
10.1109/SCED.2009.4800527
