DocumentCode

2979748

Title

The Output Conductance in GaAs Air-Gap MESFETs

Author

Nguen, N. ; Kiziloglu, K. ; Ibbetson, J. ; Yin, L.W. ; Hashemi, M. ; Mishra, U.

Author_Institution

University of California at Santa Barbara

fYear

1992

fDate

21-24 June 1992

Keywords

Air gaps; Electrons; Etching; Fabrication; Gallium arsenide; Hafnium; MESFETs; Metallization; Substrates; Wide band gap semiconductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1992. Digest. 50th Annual

Conference_Location

Cambridge, MA, USA

Type

conf

DOI

10.1109/DRC.1992.671869

Filename

671869