DocumentCode
2979778
Title
Silicon based THz antenna and filter with MEMS process
Author
Tang, Hong Jun ; Hong, Wei ; Yang, Guang Qi ; Chen, Ji Xin
Author_Institution
State Key Lab. of Millimeter Waves, Southeast Univ., Nanjing, China
fYear
2011
fDate
7-9 March 2011
Firstpage
148
Lastpage
151
Abstract
A silicon based THz substrate integrated waveguide (SIW) bandpass filter with a pair of antipodal linearly tapered slot Antennas (ALTSA) is designed and fabricated with MEMS process. A prototype with passband range 350GHz~370GHz is measured by using a quasi-optic measurement system. The measured data are in agreement with the simulated results, which show the filter has good selection performance and verified the wideband characteristic of the ALTSAs.
Keywords
linear antennas; micromechanical devices; silicon; slot antennas; submillimetre wave antennas; submillimetre wave filters; waveguide antennas; waveguide filters; ALTSA; MEMS process; SIW; Si; antipodal linear tapered slot antennas; frequency 350 GHz to 370 GHz; quasi-optic measurement system; silicon based THz substrate integrated waveguide bandpass filter; Antenna measurements; Band pass filters; Cavity resonators; Micromechanical devices; Microwave filters; Rectangular waveguides; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Antenna Technology (iWAT), 2011 International Workshop on
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-9133-9
Type
conf
DOI
10.1109/IWAT.2011.5752383
Filename
5752383
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