Embedded power technology for IPEMs packaging applications

Author

Liang, Zhenxian ; Lee, Fred C.

Author_Institution

Center for Power Electron. Syst., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA

Volume

2

fYear

2001

fDate

2001

Firstpage

1057

Abstract

Embedded power is a hybrid MCM-based 3-D integration packaging technology developed for integrated power electronics module application. Inside of the module the multiple bare power chip´s IGBTs or MOSFETs are buried in a ceramic frame and covered by dielectric with via holes on the Al pads of the chips. Then a deposited metallization interconnects the power devices and other electronics circuitry. Dielectric isolation pattern is fabricated using screen-printing approach. Multilayer metallization is deposited by sputtering and electroplating technologies. Two IPEMs have been fabricated to demonstrate the feasibility of this power electronics integration technology. Details of design and processing, as well as experiment results are presented

Keywords

MOSFET; electroplating; insulated gate bipolar transistors; interconnections; metallisation; multichip modules; sputtering; Al pads; IGBT; MOSFET; ceramic frame; deposited metallization; dielectric; dielectric isolation pattern; electroplating technologies; embedded power technology; holes; hybrid MCM-based 3-D integration packaging technology; integrated power electronics module application; multilayer metallization; power devices interconnection; power electronics integration technology; screen-printing approach; sputtering technologies; Ceramics; Dielectrics; Electronics packaging; Insulated gate bipolar transistors; Integrated circuit interconnections; Isolation technology; MOSFETs; Metallization; Nonhomogeneous media; Power electronics;

fLanguage

English

Publisher

ieee

Conference_Titel

Applied Power Electronics Conference and Exposition, 2001. APEC 2001. Sixteenth Annual IEEE

Conference_Location

Anaheim, CA

Print_ISBN

0-7803-6618-2

Type

conf

DOI

10.1109/APEC.2001.912497

Filename

912497