Robust control methodologies for optical micro electro mechanical system - new approaches and comparison

The paper presents a comparison of three new robust control approaches for a micro electro mechanical system (MEMS) optical switch, considering uncertainties such as system parameter variations, external disturbance, and un-modeled dynamics. The control approaches are sliding mode control, high gain control, and model free based control. Two of these approaches are quite novel in the field of MEMS control design. The comparative results highlights the main advantages of the proposed approaches which are simplicity, practicably, low computation burden, and low simulation time to control of electro mechanical systems.