Title :
Understanding and designing to comply with SEMI S2
Author_Institution :
Global Semicond. Safety Services, USA
Abstract :
SEMI S2-93A addresses all hazards associated with semiconductor equipment operation, maintenance and service. Engineers should design for compliance since retrofit is time consuming. End-user requirements will become commonplace
Keywords :
health hazards; maintenance engineering; safety; semiconductor device manufacture; SEMI S2-93A; design for compliance; end-user requirements; hazards; maintenance; semiconductor equipment operation; service; Safety;
Conference_Titel :
Electro/99 Technical program, 1999. Proceedings of the
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-5475-3
DOI :
10.1109/ELECTR.1999.779330
