Title :
Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3)
Abstract :
The following topics are dealt with: IC (integrated circuit) micro-motors; electroquasistatic induction micro-motors; the wobble motion; fluid flow in micron and submicron size channels; micro actuators for aligning optical fibers; a sensory-guided coronary deobstruction catheter; laterally driven polysilicon resonant microstructures; advances in processing techniques for silicon micromechanical devices with smooth surfaces; tuning forks in silicon; sensors, actuators, and control in legged robots; self-testable accelerometer systems; micro Stirling engines; and an electrostatic microactuator for electromechanical relay
Keywords :
electric actuators; electric sensing devices; integrated circuit technology; small electric machines; Si micromechanical devices; actuators; aligning optical fibers; control in legged robots; electroquasistatic induction micro-motors; electrostatic microactuator; fluid flow in micron channels; laterally driven polysilicon resonant microstructures; micro Stirling engines; micro actuators; micro-motors; processing techniques; self-testable accelerometer systems; sensors; sensory-guided coronary deobstruction catheter; smooth surfaces; tuning forks; wobble motion;
Conference_Titel :
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Salt Lake City, UT, USA
DOI :
10.1109/MEMSYS.1989.77949
