Title :
Analysis of a Bilaminar Circular Piezoelectric Actuator for Micropumps
Author :
Johari, Juliana ; Majlis, Burhanuddin Yeop
Author_Institution :
Univ. Kebangsaan Malaysia, Bangi
fDate :
Oct. 29 2006-Dec. 1 2006
Abstract :
This paper presents a general approach to the problem of modeling diaphragm micropumps. This study utilized the finite element method to optimize the deflection of a bilaminar circular plate which consist of a single piezoelectric disc as an actuator and bonded to an elastic diaphragm of certain dimensions. Optimum actuator dimensions were fixed for a determined diaphragm dimensions.
Keywords :
diaphragms; finite element analysis; micropumps; piezoelectric actuators; bilaminar circular piezoelectric actuator analysis; bilaminar circular plate; diaphragm micropump modeling; elastic diaphragm; finite element method; micropumps; optimum actuator; piezoelectric disc; Biomembranes; Bonding; Capacitive sensors; Finite element methods; Microfluidics; Micropumps; Nanoelectronics; Optimization methods; Piezoelectric actuators; Silicon;
Conference_Titel :
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-9730-4
Electronic_ISBN :
0-7803-9731-2
DOI :
10.1109/SMELEC.2006.381029
