Title :
Modeling of a cumulative distribution function of electrons on energy for gas plasma
Author_Institution :
Novosibirsk State Tech. Univ.
Abstract :
The account of a cumulative distribution function of electrons on energies with the help of the Boltzmann equation on an interval from 0 up to 10 eV is conducted
Keywords :
Boltzmann equation; plasma kinetic theory; 0 to 10 eV; Boltzmann equation; cumulative distribution function; electron energy distribution; gas plasma; Distribution functions; Electrons; Equations; Etching; Ionization; Kinetic theory; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma properties;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-5903-8
DOI :
10.1109/APEIE.2000.913078
