Title :
Fabrication technology of optical waveguides on glasses
Author :
Orlikov, N.L. ; Orlikov, L.N. ; Shandarov, S.M.
Author_Institution :
Tomsk State Univ. of Control Syst. & Radioelectron.
Abstract :
Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure
Keywords :
lead compounds; optical fabrication; optical glass; optical planar waveguides; sputter deposition; PbO; diffusion at atmospheric pressure; fabrication technology; lead oxide film formation; optical waveguides on glasses; optoelectronic elements; thermovacuum sputtering; Chemical elements; Chemical technology; Glass; Optical device fabrication; Optical films; Optical refraction; Optical surface waves; Optical waveguides; Sputtering; Temperature;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-5903-8
DOI :
10.1109/APEIE.2000.913081
