DocumentCode
2991003
Title
Degradation process research of microelectromechanical structures of pressure transducers
Author
Adarchin, S.A. ; Kuzhnenkov, A.S.
Author_Institution
Joint Stock Co. Autoelectronics, Kaluga, Russia
fYear
2000
fDate
2000
Firstpage
162
Lastpage
163
Abstract
The paper analyses temperature hysteresis of pressure transducer output signal and reveals its regular change with time. A mathematical model of hysteresis temporal increase is created, and its effect on reliability of pressure transducers is determined
Keywords
failure analysis; hysteresis; microsensors; piezoresistive devices; pressure transducers; semiconductor device reliability; 125 C; 25 C; control systems; degradation process; failure analysis; mathematical model; microelectromechanical structures; pressure transducers; reliability; temperature hysteresis; transducer output signal; Control systems; Degradation; Failure analysis; Hysteresis; Maintenance; Mathematical model; Microprocessors; Temperature measurement; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
0-7803-5903-8
Type
conf
DOI
10.1109/APEIE.2000.913113
Filename
913113
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