• DocumentCode
    2991003
  • Title

    Degradation process research of microelectromechanical structures of pressure transducers

  • Author

    Adarchin, S.A. ; Kuzhnenkov, A.S.

  • Author_Institution
    Joint Stock Co. Autoelectronics, Kaluga, Russia
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    162
  • Lastpage
    163
  • Abstract
    The paper analyses temperature hysteresis of pressure transducer output signal and reveals its regular change with time. A mathematical model of hysteresis temporal increase is created, and its effect on reliability of pressure transducers is determined
  • Keywords
    failure analysis; hysteresis; microsensors; piezoresistive devices; pressure transducers; semiconductor device reliability; 125 C; 25 C; control systems; degradation process; failure analysis; mathematical model; microelectromechanical structures; pressure transducers; reliability; temperature hysteresis; transducer output signal; Control systems; Degradation; Failure analysis; Hysteresis; Maintenance; Mathematical model; Microprocessors; Temperature measurement; Temperature sensors; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    0-7803-5903-8
  • Type

    conf

  • DOI
    10.1109/APEIE.2000.913113
  • Filename
    913113