DocumentCode
2992154
Title
Laser probing and FEM modeling of solidly mounted resonators
Author
Tikka, P.T. ; Kaitila, J. ; Ella, J. ; Makkonen, T. ; Knuuttila, J.V. ; Westerholm, J. ; Salomaa, M.M.
Author_Institution
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Volume
3
fYear
1999
fDate
13-19 June 1999
Firstpage
1373
Abstract
The ultrasonic vibrations of a solidly mounted resonator are probed utilizing a scanning laser interferometric technique. The vibrations are also simulated using a model of a solidly mounted resonator and applying 2D FEM modeling for the solution of the eigenmodes.
Keywords
crystal resonators; eigenvalues and eigenfunctions; finite element analysis; light interferometry; probes; ultrasonic devices; FEM modeling; eigenmodes; laser probing; scanning laser interferometric technique; solidly mounted resonators; ultrasonic vibrations; Electrodes; Impedance; Laser modes; Laser theory; Optical materials; Optical resonators; Optical surface waves; Solid lasers; Solid modeling; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location
Anaheim, CA, USA
Print_ISBN
0-7803-5135-5
Type
conf
DOI
10.1109/MWSYM.1999.779643
Filename
779643
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