DocumentCode
2995119
Title
Micromachining Today
Author
Muller, Richard S.
Author_Institution
University of California
fYear
1993
fDate
12-15 Jul 1993
Firstpage
7
Lastpage
7
Keywords
Actuators; Fabrication; Mechanical factors; Mechanical sensors; Microelectronics; Micromachining; Micromechanical devices; Optical films; Semiconductor films; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700242
Filename
700242
Link To Document