Title :
Arrays Of Gated Field-emitter Cones Having 0.32-μm Tip-to-tip Spacings
Author :
Bozler, C.O. ; Harris, C. Thomas ; Rabe, Steffen ; Rathman, D.D. ; Goodhue, W.D. ; Hollis, Mark A.
Author_Institution :
Massachusetts Institute of Technology
Keywords :
Anodes; Application software; Breakdown voltage; Current density; Field emitter arrays; Ionization; Laboratories; Lithography; Power dissipation; Transconductance;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700243