DocumentCode
2995351
Title
Microelectromechanical systems (MEMS)
fYear
2011
fDate
14-16 March 2011
Firstpage
255
Lastpage
256
Abstract
Start of the above-titled section of the conference proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
System Theory (SSST), 2011 IEEE 43rd Southeastern Symposium on
Conference_Location
Auburn, AL
ISSN
0094-2898
Print_ISBN
978-1-4244-9594-8
Type
conf
DOI
10.1109/SSST.2011.5753816
Filename
5753816
Link To Document