DocumentCode
2995414
Title
An electrostatic microactuator for electro-mechanical relay
Author
Sakata, Minoru
Author_Institution
OMRON Tateisi Electron. Co., Kyoto, Japan
fYear
1989
fDate
20-22 Feb 1989
Firstpage
149
Lastpage
151
Abstract
The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered
Keywords
boundary-elements methods; electric actuators; electrostatic devices; relays; BEM; boundary-element method; contact force; electro-mechanical relay; electromechanical relay; electrostatic fields; electrostatic microactuator; fabrication process; microactuator technology; miniature relay; response time; Electrodes; Electronics packaging; Electrostatics; Fabrication; Glass; Microactuators; Process design; Prototypes; Relays; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Salt Lake City, UT
Type
conf
DOI
10.1109/MEMSYS.1989.77980
Filename
77980
Link To Document