DocumentCode
2995845
Title
Field-emitter-array Performance Enhancement Using Glow Discharge Processing
Author
Schwoebel, P.R. ; Brodie, I. ; Spind, C.A.
Author_Institution
SRI International
fYear
1993
fDate
12-15 Jul 1993
Firstpage
14
Lastpage
14
Keywords
Cleaning; Electron tubes; Glow discharges; Hydrogen; Laboratories; Microwave antenna arrays; Microwave devices; Microwave technology; Stability; Surface contamination;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700246
Filename
700246
Link To Document