Title :
High-speed MEMS-based gas chromatography
Author :
Agah, M. ; Lambertus, G.R. ; Sacks, R.D. ; Wise, K.D.
Author_Institution :
Eng. Res. Center for Wireless Integrated MicroSystems, Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper reports microfabricated silicon-on-glass separation columns for high-speed gas chromatography systems. The columns are 25cm long with on-chip heaters and sensors for pressure and temperature. Programmed with temperature ramps of 10°C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10s, including simulants for chemical warfare agents.
Keywords :
chromatography; microsensors; 25 cm; component gaseous mixtures; high-speed MEMS; high-speed gas chromatography system; low-mass columns; on-chip heater; on-chip sensors; silicon-on-glass separation column; temperature ramps; Chemical sensors; Coatings; Detectors; Gas chromatography; Gases; Signal generators; Space exploration; Temperature sensors; Thermal sensors; Wireless sensor networks;
Conference_Titel :
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
Print_ISBN :
0-7803-8684-1
DOI :
10.1109/IEDM.2004.1419055
