High-speed measuring equipment of fiber core position of optical fiber array using piezo actuator

A new measuring method of the offset of the fiber core position for an optical fiber array was investigated. In the conventional method, the absolute core positions are measured by a CCD camera and laser interferometers, but the measurement time is rather long. In the new method, the sample array is compared with the standard array and its core positions are measured relatively. The standard array is fixed on the piezoelectric actuator and given a high-speed and minute circular motion, and the sample array is set face to face with it. The relative offset of the fiber core position of the sample is obtained in a short time by measuring the vibration of the optical coupling coefficient that is produced by the circular motion. The repeatability of the measurement is under 0.05 μm and good agreement with the conventional method is obtained. We can apply this new method to the automatic inspection of the fiber array