Title :
Applications of MEMS in Robotics and BioMEMS
Author :
Khorgade, Manisha P. ; Gaidhane, Awani
Author_Institution :
ETC Dept., NYSSCOER, Nagpur, India
fDate :
March 30 2011-April 1 2011
Abstract :
The adoption rate for unmanned systems continues to increase in the military, defense, aerospace and robotics industries, and is now also being embraced in many new markets across a variety of applications. The benefits of autonomous mobility, improved safety, remote operation, remote data collection, and improved repeatability are just a few of the reasons why the field of unmanned systems is poised for growth. After the VLSI technology now days Micro Electro Mechanical System is the most upcoming technology. This paper gives the introduction to the MEMS devices, the applications of MEMS and NEMS in robotics and also in biomedical like Bio-MEMS like lab on chip.
Keywords :
medical robotics; micromechanical devices; nanoelectromechanical devices; Bio-MEMS; MEMS; VLSI technology; autonomous mobility; micro electro mechanical system; remote data collection; remote operation; robotics industries; unmanned systems; Acceleration; Accelerometers; Biology; Micromechanical devices; Robot sensing systems;
Conference_Titel :
Computer Modelling and Simulation (UKSim), 2011 UkSim 13th International Conference on
Conference_Location :
Cambridge
Print_ISBN :
978-1-61284-705-4
Electronic_ISBN :
978-0-7695-4376-5
DOI :
10.1109/UKSIM.2011.106
