• DocumentCode
    2999987
  • Title

    Fabrication And Characterization Of Silicon Field Emission Diodes And Triodes

  • Author

    Yaun, Meiying ; Tong, Shihao ; Li, Qiong ; Xu, Jingfang ; Zhang, Duan ; Wu, Junlei

  • Author_Institution
    East China Normal University
  • fYear
    1993
  • fDate
    12-15 Jul 1993
  • Firstpage
    54
  • Lastpage
    55
  • Keywords
    Anodes; Character recognition; Diodes; Electron emission; Fabrication; Oxidation; Silicon; Vacuum technology; Voltage; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
  • Print_ISBN
    0-7803-0852-2
  • Type

    conf

  • DOI
    10.1109/IVMC.1993.700270
  • Filename
    700270
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2999987