• DocumentCode
    30026
  • Title

    Highly Sensitive \\beta {-}{\\rm Ga}_{2}{\\rm O}_{3} Nanowire Nanowires Isopropyl Alcohol Sensor

  • Author

    Ya-Ling Wu ; Qiuping Luan ; Shoou-Jinn Chang ; Zhiyong Jiao ; Wen Yin Weng ; Yo-Hong Lin ; Cheng Liang Hsu

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    14
  • Issue
    2
  • fYear
    2014
  • fDate
    Feb. 2014
  • Firstpage
    401
  • Lastpage
    405
  • Abstract
    We report the growth of β-Ga2O3 nanowires using a vapor phase transport method and the fabrication of β-Ga2O3 nanowire gas sensor. The β-Ga2O3 nanowire sensor shows reversible response to isopropyl alcohol (IPA) gas at temperature as low as 100 °C. With 300 ppm IPA gas introduced, it was found that measured responses were ~ 7.5%, 13.5%, and 23% when the sensor was operated at 100 °C, 200 °C, and 300 °C, respectively. It was also found that the responses measured at 300 °C were ~ 9%, 15.5%, 24%, and 33% when the injected IPA gas concentrations were 100, 200, 300, and 400 ppm, respectively.
  • Keywords
    chemical variables measurement; gallium compounds; gas sensors; nanofabrication; nanosensors; nanowires; organic compounds; Ga2O3; injected IPA gas concentration; nanowire gas sensor fabrication; nanowire isopropyl alcohol sensor; response measurement; temperature 100 degC; temperature 200 degC; temperature 300 degC; vapor phase transport method; Educational institutions; Fabrication; Gas detectors; Gold; Temperature measurement; Temperature sensors; $betahbox{-}{rm Ga}_{2}{rm O}_{3}$; IPA; gas sensor; nanowire; response;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2013.2283885
  • Filename
    6613568