DocumentCode
30026
Title
Highly Sensitive
Nanowire Nanowires Isopropyl Alcohol Sensor
Author
Ya-Ling Wu ; Qiuping Luan ; Shoou-Jinn Chang ; Zhiyong Jiao ; Wen Yin Weng ; Yo-Hong Lin ; Cheng Liang Hsu
Author_Institution
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume
14
Issue
2
fYear
2014
fDate
Feb. 2014
Firstpage
401
Lastpage
405
Abstract
We report the growth of β-Ga2O3 nanowires using a vapor phase transport method and the fabrication of β-Ga2O3 nanowire gas sensor. The β-Ga2O3 nanowire sensor shows reversible response to isopropyl alcohol (IPA) gas at temperature as low as 100 °C. With 300 ppm IPA gas introduced, it was found that measured responses were ~ 7.5%, 13.5%, and 23% when the sensor was operated at 100 °C, 200 °C, and 300 °C, respectively. It was also found that the responses measured at 300 °C were ~ 9%, 15.5%, 24%, and 33% when the injected IPA gas concentrations were 100, 200, 300, and 400 ppm, respectively.
Keywords
chemical variables measurement; gallium compounds; gas sensors; nanofabrication; nanosensors; nanowires; organic compounds; Ga2O3; injected IPA gas concentration; nanowire gas sensor fabrication; nanowire isopropyl alcohol sensor; response measurement; temperature 100 degC; temperature 200 degC; temperature 300 degC; vapor phase transport method; Educational institutions; Fabrication; Gas detectors; Gold; Temperature measurement; Temperature sensors; $betahbox{-}{rm Ga}_{2}{rm O}_{3}$ ; IPA; gas sensor; nanowire; response;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2013.2283885
Filename
6613568
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